- Magnetron sputtering systems may be pumped by either a cryogenic or turbomolecular main pump depending on the customer’s process conditions.
- 1 Quick Start Manual (Version – I) Magnetron Sputtering System (DaON 1000S) Murtaza Saleem, Muhammad Sabieh Anwar 11 September, 2013.
- RF Magnetron Sputtering system Make: Anelva Sputtering Unit Model SPF-332H Centre for Excellence in Nano-Electronics Indian Institute of Science, Bangalore-12.
- PVD Products manufactures magnetron sputtering systems for metallic and dielectric thin film deposition on substrates up to 300 mm in diameter.
AJA Magnetron Sputter System Operation Manual Arnold Duenes January 27, 2006 Gordon. All four sputter guns in MS03 use magnetron sputtering to increase the gas.
PVD Products manufactures complete integrated sputtering systems to meet your specific deposition requirements. These systems can be configured with multiple RF and/or DC magnetron sources ranging in size from 1 inch (25 mm) to 8 inches (200 mm) in diameter. We can provide systems to handle wafers up to 300 mm in diameter, heating up to 900°C and RF bias with additional ports for diagnostics such as Reflection High-Energy Electron Diffraction (RHEED), ellipsometry ...
In-line sputtering systems & batch sputtering equipment. Whatever you’re looking for Semicore probably has a more advanced version that is tested.
Torr International's Compact Research Coater (model number CRC- 600) Sputtering System is a manual planar magnetron sputtering system designed for the nanotechnology.